Ionizer Bar Integration

Project Type: Integration, ESD / ESA Control

Scope: Electrical, and Mechanical Design

Industry: Semiconductor, Automation, Wafer Handling, Wafer Inspection

Customer: Multiple

An ionizer bar is used during wafer inspection to neutralize static charge generated by wafer handling, robot motion, and airflow inside the inspection tool. This prevents electrostatic discharge and reduces particle attraction that could damage highly sensitive, fully fabricated wafers.

In this project, a Simco ionizer bar was integrated into the wafer inspection system. Custom mounting brackets with height adjustability above the wafer chuck were designed to optimize ionization performance and provide flexibility for different inspection and EFEM configurations. An air regulator with a clean air filter was added to provide precise control over ion decay and charging time.

Some customers prefer CabX or other ionizer bar brands, which were also successfully integrated into inspection and EFEM systems based on customer requirements.